The study of Low Temperature Nano-crystal SiGe Thin Film Prepared by PECVD with Layer-By-Layer Technology
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 93 === Thin film transistors (TFTs) have been employed to drive and address each pixel in the flat panel displays. Amorphous TFTs have advantages of low temperature and simple deposition, but also possess the drawback of poor current driving ability. For the time b...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76921756721889483792 |