The Study of TiW & W Transparent Electrodes and its Application in Nitride-Based Lights Emitting Diodes and Photodetectors
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 93 === In this thesis, characteristics of TiW and W, which prepared by RF magnetron sputtering system, has been studied. TiW and W have the best film quality at the RF power of 300W and 250W, respectively. At wavelength of 360 nm, transmittance and conductivity of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95387256172737742260 |