Positioning of Single or Arrays of Carbon Nanotubes Growth
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 93 === In this paper we provided a simple fabrication process to overcome the limit of the optical lithography and achieve nano-scale lithography. This process can make a nano-scale pattern like Electron-beam Lithography (EBL) or Nanoimprinting Lithography (NIL)...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17237080702427460647 |