Mechanical and Diffusion Barrier Properties of Zr(C,N) Thin Films by DC Magnetron Sputtering
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 93 === Abstract Zirconium-based nitride, carbide and Carbonitride are technologically important materials for many applications because of their outstanding properties including hardness, melting point, corrosion resistance and abrasion resistance. Although the p...
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| Format: | Others |
| Language: | zh-TW |
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2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05055638224035486268 |