Microfabrication of Carbon Nanotubes on a Microfluidic Chip and its Application for Protein Analysis

• Main Authors: Hao-Hsuan Wu, 吳豪軒
• Other Authors: Jyh-Ming Ting
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/46231743337323952216

碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 93 === 　Our research creates a novel nanotube-microfludic chip by integrating MEMS and nanomaterial process. We discuss the adsportion behavior between the protein and carbon nanotube in the microchannel of microfludic chip. This research includes three parts. 　In the first part, we grow nanotube on the surface of sodalime glass by RF sputtering and Microwave-plasma chemical vapor deposition (MP-CVD) and discuss the effect of parameters, such as gas ratio and growth time. The result indicates the growth of nanotube on the surface of sodalime glass is reaction -controlled mechanism. The diameter of CNTs is 22±11 nm. The Raman spectrum shows the FWHM of G-band and ID/IG of nanotube is decreasing with increasing the ratio of methane and hydrogen. And the activation energy of nanotube is 1.96 eV with increasing growth time (CH4 / H2=33.3 %) . The effect of destroying the impurity on top of nanotube is the best by Nd:YAG laser. 　In the second part, we synthesize nanotube in the microchannel of sodalime glass by RF sputtering and MP-CVD. By the way, we also discuss the effect of parameters, such as gas ratio and growth time. The result indicates the growth of nanotube in the microchannel of sodalime glass is also reaction -controlled mechanism. The diameter of CNTs is 52±6 nm. The Raman spectrum shows the FWHM of G-band of nanotube is increasing with increasing the ratio of methane and hydrogen, the ID/IG is decreasing with increasing the ratio of methane and hydrogen. The difference of nanotube on the surface and in the microchannel of sodalime glass is speculated from gas mean free path (mfp). 　In the third part, we bond the PDMS and the microchannel which have synthesized nanotube and do bioanalysis. The protein adsorption is strong with nanotube in the microfludic chip when pH < pI (βcasine), this indicates the existence of non-electrostatic and electrostatic force between the protein and nanotube in the microchannel of microfludic chip.