Growth Characteristics of Carbon Nanotubes Prepared by ICP-CVD
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 93 === Abstract Carbon nanotubes (CNTs) arrays were synthesized by inductively coupled plasma chemical vapor deposition (ICP-CVD) combined with anodic alumina oxide (AAO) on Si as nanotemplate. The parameters determining the growth characteristics of CNTs, suc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59182096398487824931 |