| Summary: | 碩士 === 國立成功大學 === 工程科學系碩博士班 === 93 === This study reports a simple fabrication process using MEMS technology to manufacture three-dimensional miniature coils which can be used to generate magnetic fields to control the movement of magnetic beads. There are two types of micro coils including 2D and 3D layouts. In general, 3D micro coils could generate a higher magnetic field than 2D counterparts. In this study, a simple and reliable process for 3D micro coil fabrication has been developed. While compared to previous studies, this new process has several advantages including no requirement for via-holes, less process time and simpler fabrication.
Two arrangements of the micro coils including a rectangular and a circular array have been developed to control magnetic beads in fluids. Experimental data show both of them could be used successfully to manipulate magnetic beads.
Micron-size magnetic beads have been used to test the performance of the developed micro coils. Experimental data show that 3D micro coil could produce a magnetic force to attract magnetic beads while applying an electric current. As expected, the collection of the magnetic beads becomes more obvious while the current gradually increases. Besides, the array-type coils could be used to move beads in step-wise motion. The developed device thus provides a useful tool for manipulation of magnetic beads.
In conclusion, this study develops a new fabrication process for 3D micro coils which can be used to manipulate magnetic beads. The developed methods could be extended for manipulation of single molecules anchored on magnetic beads, which could be used to measure physical properties of the molecules.
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