Development of Fabrication Method for Tunable Liquid Microlens

• Main Authors: Chun-Hsiu Ting, 丁群修
• Other Authors: Hsi-Harng Yang
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/91066687649036033753

碩士 === 國立中興大學 === 精密工程研究所 === 93 === This invention is to describe a simple method to fabricate variable-focus lens by using PDMS as the principal part of this variable-focus lens due to the advantage of elasticity and highly reproductivity. The major step is to fabricate microstructure as a mold by utilizing photolithography process and then to use PDMS to cast over the mold. The cured PDMS is peeled off from the mold, which is to become the microchannel and circular chamber. Making a piece of PDMS as a substrate is the second step. To reach the goal of assemblage, the way is to make the two PDMS structure bond together by using PDMS glue in the oven. After that, it is necessary to trim proper section as the principal part of this variable-focus lens. Finally, using micro pump to inject microfluidics, or cooperating micro actuator to control flow rate precisely, changes the deformation of PDMS film by microfluidic volume in order to achieve variable focal length that wanted. There are some characteristics of this study. One is completely using PDMS as final structure. It is not anxious that the structure will break to damage another device in the component. Another one is only bonding once that can effectively reduce leakage caused by unnecessary bonding crack. In addition, it doesn’t need oxygen plasma treatment or etching process, which is able to effectively reduce the cost to get mass production. By the way, in this experiment, the diameter 2000 μm focus is also made for investigation.