Study of Micro Ball Lens Fabrication Using Thermal Reflow on PTFE Coating Wafers

• Main Authors: Wen-Jen Tsai, 蔡文仁
• Other Authors: Jhy-Cherng Tsai
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/96628322574329852570

碩士 === 國立中興大學 === 精密工程研究所 === 93 === This paper presents a simple method to fabricate micro-ball and its array. The ball type microlens is a sphere which allows the light focusing in all directions on the substrate surface and thus provides the flexibility for fiber coupling in optical communication, applications optical storage systems, and biomedical instruments on PTFE coating wafers. Using the large contact angle between PTFE and melted photoresist can form micro-ball lens and its array. The main processing steps include spin coating a PTFE film on a Si wafer. Pattern sizes ranged from 60, 70 and 80μm cylindrical pot array in photoresist AZ4620 were fabricated in lithography process and thermal reflow to form micro-ball lens array. The advantages of this method include using simple coating machine, one mask for lithography process, simple fabrication process, and low material coat. From the measurement data of the measurement, the inaccuracy of photoresist for cylindrical diameter is less than 1% , the inaccuracy of diameter and height of micro-ball lens is about less than 5% and 7% .