A Study on RF MEMS Dual-Band Multiplexer Band-pass Filter

碩士 === 崑山科技大學 === 電子工程研究所 === 93 === Combination of bulk micromachining and face micromachining techniques, we present a radio-frequency MEMS stepped open-loop resonator bandpass filter in this paper. By anisotropic etching, a very thin 4mm´4mm dielectric membrane with relative dielectric constant (...

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Bibliographic Details
Main Authors: WangMing-Te, 王明德
Other Authors: Kwok-Keung Chong
Format: Others
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/37510781849202734209