Prototyping of a Hybrid Driving Circuit for Nano-Manipulation

• Main Authors: Jun-Jong Jang, 張濬鐘
• Other Authors: Fu-Sing Lee
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/76800733843897039509

碩士 === 華梵大學 === 機電工程研究所 === 93 === The main purpose of this study is to prototype a hybrid driving circuit for nano-manipulation using piezoelectric (PZT) actuators. The developed hybrid driving circuit is controlled by digital signals and operated by man-machine interfaces as to energize the piezoelectric actuators precisely and accurately. With designed-in fault-tolerance and noise-reduction concepts, the driving circuit system can therefore perform duties with high qualities of reliability as well as stability for nano-manipulation applications. A piezoelectricity actuated cantilever beam was built to apply the developed hybrid driving circuit system for experimental verifications. Resonant modes as well as fine displacements were compared with theoretic predictions as to examine the alternating current (AC) as well as direct bias (DC) emerging ability of the hybrid driving circuit system. During the experiment stages, a laser displacement meter, a Doppler interferometer and an accelerometer were all utilized to measure vibration amplitudes as well as static displacements from several nano-meters to several micro-meters. As a result, the outcome of this research successfully reveals an approach as how to design a hybrid driving circuit for precisely emerging a piezoelectric actuator with high degree of satisfaction, whether in a resonant way or in a bias way to deform the piezoelectric materials.