Characterized the surface of indium-tin-oxide upon excimer laser irradiation

• Main Authors: Yung-Chi Wang, 王泳麒
• Other Authors: Wen-Feng Liu
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/04791156155893394129

碩士 === 逢甲大學 === 電機工程所 === 93 === In this study, the effects of a KrF excimer laser irradiation on the surface work function (SWF) and surface roughness (SR) of the indium-tin-oxide (ITO) were investigated. From the observed x-ray photoelectron spectroscopy (XPS) results and atomic force microscopy (AFM) and four-point probe measurements, it is suggested that the induced surface chemical changes by laser irradiation had strong effects on the SR and SWF of ITO. Incorporation of oxygen atoms near the ITO surface during laser irradiation led to the formation of a peroxidic ITO surface, an increase in the SWF and the reduction of the SR, which could be useful for the enhancement of the hole injection in organic light emitting diodes.