The electrochemical performance forward lithium of nano crystalline Sn thin films deposited by anode shielded sputtering.
碩士 === 逢甲大學 === 材料科學所 === 93 === Sn thin film anodes have been prepared using rf magnetron sputtering. With appropriate anode shielding during deposition, the film crystallity and surface morphology can be well controlled. The set-up of the anode shielding changed the plasma ion density, resulting i...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65064708054080914167 |