The electrochemical performance forward lithium of nano crystalline Sn thin films deposited by anode shielded sputtering.

• Main Authors: Tin-Yi Lin, 林庭誼
• Other Authors: Hsin-Chih Lin
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/65064708054080914167

碩士 === 逢甲大學 === 材料科學所 === 93 === Sn thin film anodes have been prepared using rf magnetron sputtering. With appropriate anode shielding during deposition, the film crystallity and surface morphology can be well controlled. The set-up of the anode shielding changed the plasma ion density, resulting in different ion flux available on the substrate as bias was provided. Grazing angle X-ray diffractometer and field emission scanning electron microscope were used to characterize the films crystallity and surface morphology. The electrochemical properties of the thin film anodes deposited under various conditions were measured and compared. Sn thin film anodes deposited with anode shielding can develop fine and smooth morphology with nano particles (5-10 nm). High reversible capacity with low capacity can be obtained. The formation of solid electrolyte interphase was found to be a critical factor for cycling properties of Sn thin film anodes. A ultra thin SnO2 was deposited deliberately to form an artificial SEI, and the cycling properties of the Sn thin films anodes was improved significantly.