Automatic Inspection of Etching Transistors in TFT-LCD Panel

• Main Authors: Chia-Wen Tasi, 蔡嘉文
• Other Authors: Chern-Sheng Lin
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/76573806073213805790

碩士 === 逢甲大學 === 自動控制工程所 === 93 === In this research we apply an on-line automatic inspection and measurements for the panel of etching transistors of TFL-LCD (thin-film transistor liquid-crystal display). With pattern recognition technique, we can obtain the target pattern image of TFT etching transistors. With template match in the database of the system, the program judges the kinds of the target etching transistors, and finds out the central position of etching transistors, furthermore, puts the control message to the service mechanism, and calculates the width and distance of etching line. On the process of searching, analyzing, and recognizing of images, a modified template matching method, using the gradient orientation code matching, is assisted as a simple and powerful tool. It could also check several items, such as the shift in the center of illumination, non-uniform distribution illumination problems. The multipurpose image-based measurement application with unsophisticated and economical equipment is confirmed in the positioning of etching transistors pattern in the LCD fabrication. When the etching transistor was compensated to the fixed position , it carried on follow-up relevant measurement, for instance, line width、line distance、horizontal distance、vertical distance、distance of oblique line、circle and overlap, etc..