Growth of Solar Cell by Inductively-Coupled Plasma Chemical Vapor Deposition
碩士 === 逢甲大學 === 化學工程學所 === 93 === We report on the performance of solar cell with superlattice structure in the I layer of Si-based p-i-n photodiode. The superlattice structure was grown on a p-type Si substrate. We employed ICPCVD system to deposit the superlattice structure of amorphous silicon/mi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89928925675394146207 |