Design and Analysis of A Micro-stage

Design and Analysis of A Micro-stage

碩士 === 中原大學 === 機械工程研究所 === 93 === In this article, a Cartisian coordinate nano positioning stage driven by stack-type piezoelectric actuator associated with elastic-plate mechanism is developed. Flexure hinge mechanism system design and analysis by ANSYS, as well as the feed-forward controller desi...

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Bibliographic Details
Main Authors:	Chang-Wei Chiang, 江長偉
Other Authors:	Yung Ting
Format:	Others
Language:	zh-TW
Published:	2005
Online Access:	http://ndltd.ncl.edu.tw/handle/35911408601860104830

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