Design and Analysis of A Micro-stage

Design and Analysis of A Micro-stage

碩士 === 中原大學 === 機械工程研究所 === 93 === In this article, a Cartisian coordinate nano positioning stage driven by stack-type piezoelectric actuator associated with elastic-plate mechanism is developed. Flexure hinge mechanism system design and analysis by ANSYS, as well as the feed-forward controller desi...

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Main Authors: Chang-Wei Chiang, 江長偉
Other Authors: Yung Ting
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/35911408601860104830
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spelling ndltd-TW-093CYCU54890682015-10-13T15:06:51Z http://ndltd.ncl.edu.tw/handle/35911408601860104830 Design and Analysis of A Micro-stage 微動平台之設計研究 Chang-Wei Chiang 江長偉 碩士 中原大學 機械工程研究所 93 In this article, a Cartisian coordinate nano positioning stage driven by stack-type piezoelectric actuator associated with elastic-plate mechanism is developed. Flexure hinge mechanism system design and analysis by ANSYS, as well as the feed-forward controller design to deal with the hysteresis effect and the feedback PID controller design associated with high-precision capacitive sensor are included. The developed nano positioning stage is able to achieve the condition of 20 nm in positing under the condition of 15μm in stoke. Yung Ting 丁鏞 2005 學位論文 ; thesis 100 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 中原大學 === 機械工程研究所 === 93 === In this article, a Cartisian coordinate nano positioning stage driven by stack-type piezoelectric actuator associated with elastic-plate mechanism is developed. Flexure hinge mechanism system design and analysis by ANSYS, as well as the feed-forward controller design to deal with the hysteresis effect and the feedback PID controller design associated with high-precision capacitive sensor are included. The developed nano positioning stage is able to achieve the condition of 20 nm in positing under the condition of 15μm in stoke.
author2 Yung Ting
author_facet Yung Ting
Chang-Wei Chiang
江長偉
author Chang-Wei Chiang
江長偉
spellingShingle Chang-Wei Chiang
江長偉
Design and Analysis of A Micro-stage
author_sort Chang-Wei Chiang
title Design and Analysis of A Micro-stage
title_short Design and Analysis of A Micro-stage
title_full Design and Analysis of A Micro-stage
title_fullStr Design and Analysis of A Micro-stage
title_full_unstemmed Design and Analysis of A Micro-stage
title_sort design and analysis of a micro-stage
publishDate 2005
url http://ndltd.ncl.edu.tw/handle/35911408601860104830
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AT jiāngzhǎngwěi designandanalysisofamicrostage
AT changweichiang wēidòngpíngtáizhīshèjìyánjiū
AT jiāngzhǎngwěi wēidòngpíngtáizhīshèjìyánjiū
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