Design and Analysis of A Micro-stage
碩士 === 中原大學 === 機械工程研究所 === 93 === In this article, a Cartisian coordinate nano positioning stage driven by stack-type piezoelectric actuator associated with elastic-plate mechanism is developed. Flexure hinge mechanism system design and analysis by ANSYS, as well as the feed-forward controller desi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35911408601860104830 |
| Summary: | 碩士 === 中原大學 === 機械工程研究所 === 93 === In this article, a Cartisian coordinate nano positioning stage driven by stack-type piezoelectric actuator associated with elastic-plate mechanism is developed. Flexure hinge mechanism system design and analysis by ANSYS, as well as the feed-forward controller design to deal with the hysteresis effect and the feedback PID controller design associated with high-precision capacitive sensor are included. The developed nano positioning stage is able to achieve the condition of 20 nm in positing under the condition of 15μm in stoke.
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