A Study of nc-Si:H Thin Films Growth by Hot-wire CVD

A Study of nc-Si:H Thin Films Growth by Hot-wire CVD

碩士 === 建國科技大學 === 機電光系統研究所 === 93 === For thin-film-transistor (TFT) addressed liquid-crystal flat-panel displays (LCD’s), a-Si:H TFTs have been widely used.Their advantages include good switching characteristics, large-area deposition capability, reproducibility, and a low-temperature fabrication p...

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Bibliographic Details
Main Authors:	Chi-Tai Liu, 劉奇泰
Other Authors:	S.B.Hwang
Format:	Others
Language:	zh-TW
Published:	2005
Online Access:	http://ndltd.ncl.edu.tw/handle/87145825364846517400

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