Using photoresist processing to fabricate the texturing anti-reflection structure of solar cells and polymer waveguides
碩士 === 中華大學 === 電機工程學系碩士班 === 93 === In this thesis, we use photoresist (PR) processing techniques to fabricate the anti-reflection texturing structures for solar cells and to construct the polymer waveguides. We demonstrate a simple method, combining conventional optical lithography and reactive io...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2005
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Online Access: | http://ndltd.ncl.edu.tw/handle/19276985983775980605 |