Using photoresist processing to fabricate the texturing anti-reflection structure of solar cells and polymer waveguides

碩士 === 中華大學 === 電機工程學系碩士班 === 93 === In this thesis, we use photoresist (PR) processing techniques to fabricate the anti-reflection texturing structures for solar cells and to construct the polymer waveguides. We demonstrate a simple method, combining conventional optical lithography and reactive io...

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Bibliographic Details
Main Authors: Chi-Ming Hsu, 徐啟眀
Other Authors: Chao-Chia Cheng
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/19276985983775980605