Surface Layer Effects and Structural Transformation of Copper Films under Nanoindentation
碩士 === 國立中正大學 === 機械工程所 === 93 === An absorbed surface layer exists under atmosphere environment. Influence of the surface layer on mechanical characteristics of thin films becomes increasingly significant as the critical size of the device decreases. Therefore this thesis aims to investigate the de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05226217149748766590 |