Design and Analysis of a Displacement Amplified Micro-positioning Stage Using the Piezoelectric Actuator
碩士 === 國立中正大學 === 機械工程所 === 93 === The development of Micro-electro-mechanical System (MEMS) and the process of microstructure are highly required for high-precision and functional facilities. Not only the equipment of measurement but also the precise positioning device is needed for the process. Th...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27151198640301803454 |