The testing machine for micro-sensors subjected to different states of Pressure and temperature
碩士 === 淡江大學 === 機械與機電工程學系 === 92 === The primary purpose of this research is to make a test machine which is available to increase temperature, and that provides all kinds of semiconductor micro-sensors made by micro-electro-mechanical systems technique with testing use. This research also combines...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16757317000736999440 |