The testing machine for micro-sensors subjected to different states of Pressure and temperature

• Main Authors: chih-cheng chang, 張志成
• Other Authors: Lung-Jieh Yang
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/16757317000736999440

碩士 === 淡江大學 === 機械與機電工程學系 === 92 === The primary purpose of this research is to make a test machine which is available to increase temperature, and that provides all kinds of semiconductor micro-sensors made by micro-electro-mechanical systems technique with testing use. This research also combines computer auxiliary SPARTAN data-gathering system. It succeeds in different temperature and pressure to proceed with the living test of the pressure-resisted commercial pressure sensor component and the real-time sampling task. Above the Testing-gathered signal being handled and analyzed through the MATLAB software can be further concluded to the functional relation Z=f(X,Y) in which the output voltage(Z) is corresponding to the temperature(Y), and the micro-sensor''s output performance of pressure-resisted model including the sensitivity, linearity, temperature effect and slow-moving will be totally understood.