Optimal operation of Chiller and Cooling tower for semiconductor Factory
碩士 === 國立臺北科技大學 === 冷凍與低溫科技研究所 === 92 === Recently, the semiconductor manufacturing industry not only fast growth but also power consumption intensive. The running reliability will reduce, therefore to 『save power consumption』is an important item. It can be seen in the documents that the power consu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60759039197562887531 |