The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer

碩士 === 南台科技大學 === 電機工程系 === 92 === When environment fact is set, we demonstrate a set-by-step program, which we used to optimize the performance of a DC pulsed ionizer in a cleanroom environment. By sequentially choosing the appropriate pulsewidth time, magnitude, and (-v/+v) percentage output of em...

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Main Authors: chagn ming ren, 張銘仁
Other Authors: 康智傑
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/32769254570013426397
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spelling ndltd-TW-092STUT04420432016-06-15T04:17:29Z http://ndltd.ncl.edu.tw/handle/32769254570013426397 The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer 應用調變脈波直流離子消除以減低無塵室靜電放電(ESD)現象及靜電微塵吸附污染(ESA)問題 chagn ming ren 張銘仁 碩士 南台科技大學 電機工程系 92 When environment fact is set, we demonstrate a set-by-step program, which we used to optimize the performance of a DC pulsed ionizer in a cleanroom environment. By sequentially choosing the appropriate pulsewidth time, magnitude, and (-v/+v) percentage output of emitter supply voltage, one can obtain the optimal voltage swing and decay time. The effectiveness of this strategy is validated through a three-month follow-up monitoring. 康智傑 2004 學位論文 ; thesis 85 zh-TW
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language zh-TW
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description 碩士 === 南台科技大學 === 電機工程系 === 92 === When environment fact is set, we demonstrate a set-by-step program, which we used to optimize the performance of a DC pulsed ionizer in a cleanroom environment. By sequentially choosing the appropriate pulsewidth time, magnitude, and (-v/+v) percentage output of emitter supply voltage, one can obtain the optimal voltage swing and decay time. The effectiveness of this strategy is validated through a three-month follow-up monitoring.
author2 康智傑
author_facet 康智傑
chagn ming ren
張銘仁
author chagn ming ren
張銘仁
spellingShingle chagn ming ren
張銘仁
The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer
author_sort chagn ming ren
title The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer
title_short The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer
title_full The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer
title_fullStr The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer
title_full_unstemmed The Optimal Control Strategies of Clean room ESD/ESA Problems by DC Pulsed Ionizer
title_sort optimal control strategies of clean room esd/esa problems by dc pulsed ionizer
publishDate 2004
url http://ndltd.ncl.edu.tw/handle/32769254570013426397
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