The development of the linear axis measurement system of Meso-Scale machining

• Main Authors: Ching-Tang Chou, 周敬棠
• Other Authors: Rong-Feng Tsai
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/9mt787

碩士 === 國立虎尾科技大學 === 動力機械工程研究所 === 92 === In this thesis, the two linear axis measurement systems for the Meso-scale machining were developed: (1) the laser triangulation measurement system for linear axis performance measuring, and (2) two PSDs and lasers with fixtures measuring system for linear axis performance measuring. It is easy to set up the laser triangulation measurement system. In addition, its measuring principle is simple and the system can be applied to 1D、2D、3D linear axis measurement. However, price of the component is expensive and the result of the measurement is not satisfying enough, so it is only studied in verifying and 1D measuring without going any further exploration. The PSDs measurement system consists of 2 laser and 2 PSDs with the fixtures. So far, both software and hardware were established in this measurement system through verifying and testing. Its accuracy can be up to 0.5μm、the uncertainty can be up to 1μm, and it is easy to measured 1D、2D、3D static and dynamic error of linear axis of the Meso-scale machining. Besides, the measurement system was focused on high feed rate of the machining stage, analyze the contouring to estimate performance of the controller of machining. And the error as a result of high feed rate of the machining stage was compensated with Taguchi methods. The result is reasonable. It can be compensated since original error in 250μm-500μm to be reduced in 10μm in the optimum state.