| Summary: | 碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 92 === In this thesis, the basic characteristics of PSD is investigated. Besides the
effect of resolution by the light spot projected on PSD is studied, the difference
of using amplitude and phase detection is discussed by modulation of sine waves
of different frequencies. Futhermore, the necessary characteristic parameters for
applications are established.
In order to verify the basic properties of PSD, the research is focused on a
series of basic qualities of practical system including: calibration system of
Laser Mark, signal processing of interferometer, optical Lever, and acoustic
optical deflector. Experiment results are proved that the application of PSD in
the high precision system is feasible.
|
|---|
