Development of new optical microlens array mold insert formation using lithography process

• Main Authors: Che-Ping Lin, 林哲平
• Other Authors: Ching-Kong Chao
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/78273657428384912673

博士 === 國立臺灣科技大學 === 機械工程系 === 92 === This dissertation presents a new fabrication of various microlens array mold insert formation for micro-optics using lithography process. It can improve the manufacturing process of microlens array and increase the fill factor for raising their overall light efficiency. Using the method of UV proximity exposure, the experimental results showed that the microlens array could be formed automatically without using the thermal reflow process when the printing gap between mask and photoresist ranged from 240μm to 840μm. The fabricating process could be improved. Besides, a mathematical model for designing and fabricating a square and hexagonal microlens array using a thermal reflow process was developed. It proved that the microlens array could be produced without a gap at each microlens periphery and the fill factor could be raised to 100﹪. The errors between theoretical model and actual photoresist column thickness were within ±8％ for square and ±3％ for hexagonal microlens array. These models were feasible for fabricating various sized square or hexagonal microlens arrays. The fabricating process of micro-ball lens array used for optical fiber components also could be simulated using similar method. The error also was verified within 8％.