The study of Au metallization layers on GaP(111) after thermal processes
碩士 === 國立臺灣科技大學 === 機械工程系 === 92 === Abstract We have studied the metallization layers of Au/AuBe/Au on GaP(111) substrates. We evaporated the Au/AuBe/Au layers onto the GaP(111) wafers by a thermal evaporation method. After the evaporation process the GaP wafers were annealed in either t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87618005879304780425 |