Development of Excimer laser inducing HREC technology
碩士 === 國立臺灣科技大學 === 電子工程系 === 92 === We have successfully used SiH4 as main raw material to deposit semitransparent film that the main composition of the film is silicon oxynitride. And, it has light absorption (absorption coefficient from 0 to 20000 cm-1) that can be applied as heat retaining layer...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93734649617124320973 |