Study of Aluminum Nitride Thin Films Fabricated
碩士 === 國立臺灣科技大學 === 材料科技研究所 === 92 === The content of this thesis is to fabricate aluminum nitride thin films with c-axis preferred orientation by the reaction sputtering. Relation between the crystal orientation and the working pressure,target to substrate distance, and the temperature o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2003
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21895891176076772168 |