Air Damping on Perforated Microstructures

• Main Authors: Jin-Hsiang Jang, 張晉翔
• Other Authors: Wen- Jeng Hsueh
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/35906032347597451593

碩士 === 國立臺灣大學 === 工程科學及海洋工程學研究所 === 92 === This paper investigates effects of squeeze film for microstructures that oscillates in the normal direction. The governing equation uses the Navior-Stokes equation and makes several assumptions. We not only consider the thin plate of different geometric shape but also consider the thin plate with different kinds of boundary condition. Furthermore, utilizing the analytic results of the circular plate to simulate the perforated microstructures. Finally, we use the analytic results to apply on a capacitive micro-accelerometer and discuss variant performance while different numbers and sizes of perforations.