Fabrication and Characterization of Poly Silicon Pressure Sensor
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 92 === Abstrac This paper focus on the study of polysilicon pressure sensor fabrication and characterization for the measurement. Silicon single crystal type piezoresistor is a common useful pressure sensors recently. However ,the fabrication pressure of diaphragm str...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76635812493369404785 |