Fabrication and Characterization of Poly Silicon Pressure Sensor

• Main Authors: Huang Chien Lung, 黃建融
• Other Authors: 張忠誠
• Format: Others
• Language: en_US
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/76635812493369404785

碩士 === 國立臺灣海洋大學 === 電機工程學系 === 92 === Abstrac This paper focus on the study of polysilicon pressure sensor fabrication and characterization for the measurement. Silicon single crystal type piezoresistor is a common useful pressure sensors recently. However ,the fabrication pressure of diaphragm structure are a complicate procedure that may introduce a reliability problem. On the other side, the polysilicon piezosistor pressure sensor has a easily processes to form the diaphragm structure, that will enhance the quality of the pressure sensor. So in this project a polysilicon pressure sensors is fabricated and tested. Key word: Pressure sensor; Piezoresistive effect; Wheatstone bridge.