Fabrication and Characterization of Poly Silicon Pressure Sensor
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 92 === Abstrac This paper focus on the study of polysilicon pressure sensor fabrication and characterization for the measurement. Silicon single crystal type piezoresistor is a common useful pressure sensors recently. However ,the fabrication pressure of diaphragm str...
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| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76635812493369404785 |
| Summary: | 碩士 === 國立臺灣海洋大學 === 電機工程學系 === 92 === Abstrac
This paper focus on the study of polysilicon pressure sensor fabrication and characterization for the measurement. Silicon single crystal type piezoresistor is a common useful pressure sensors recently. However ,the fabrication pressure of diaphragm structure are a complicate procedure that may introduce a reliability problem. On the other side, the polysilicon piezosistor pressure sensor has a easily processes to form the diaphragm structure, that will enhance the quality of the pressure sensor. So in this project a polysilicon pressure sensors is fabricated and tested.
Key word: Pressure sensor; Piezoresistive effect; Wheatstone bridge.
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