Design and Analysis of White Light Interferometric Techniques in Microstructure Profile Measurement
碩士 === 國立臺灣師範大學 === 機電科技研究所 === 92 === In the recent years, with the advance of nano technology and micro-systems technology, traditional testing and measurement techniques can hardly meet the needs and applications from industries. To meet the demands, from them and universities, on the precise mea...
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| Format: | Others |
| Language: | en_US |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73961368321242414243 |