| Summary: | 碩士 === 國立臺灣師範大學 === 機電科技研究所 === 92 === In the recent years, with the advance of nano technology and micro-systems technology, traditional testing and measurement techniques can hardly meet the needs and applications from industries. To meet the demands, from them and universities, on the precise measurement and the automation engineering, incorporating the instrumentation and automation with the opto-electronic technology is very important. In this paper, our objective is to design and analyze white light interferometric techniques in microstructure profile measurement, especially for the surfaces of micro-mechatronic, micro-optical, and semi-conductor elements to do the non-destructive, real-time, and high resolution profile measurements. According to the property of short coherence length of white light, the white-light interferometry makes use of zero-order interference fringe identification method to find the position of the maximum intensity of interference fringes. First, we study the theoretical basis of white light interferometry (WLI), from the beat effects and the coherence length. Then, we explore the design method needing spectral filters to limit the bandwidth of white light. The different bandwidth of filters will change the coherence length of white light. Moreover, we make a test-tool for measuring the coherence length of filtered light. For the system, we adopt a Linnik interferometer configuration, as an example, to build up the measurement system. The related simulation results are quite satisfactory. We expect that it would be highly beneficial to the research of academic activities and the development of related industries for the techniques of white light testing and measurement.
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