| Summary: | 碩士 === 國立臺灣師範大學 === 機電科技研究所 === 92 === With the rapid development of communication industry, SAW devices are noticeable in communication application because SAW filters have advantages of small volume, lightness, low costs, high IC-compatibility, and better filtering performance. Different piezoelectric materials can be selected to fabricate various filters with dissimilar wave band, and these SAW filters have become key components of wireless communication and mobile phone. Except for satisfactory signal processing application, SAW devices, which have excellent characteristic of high mass sensitivity, have been further applied to bio-sensing areas in the recent decade. SAW devices can be used to sense mass, density, humidity, concentration, vapor recognition, viscosity, and so forth. Although SAW devices for signal processing and biosensor have different design rule, these devices will use the same physical properties and principles.
In this study, Love wave biosensors using diluted SU-8 and AZ 6112 as guiding layer are fabricated because of their advantages of low cost and low density. They can improve the shortcomings using silicon dioxide as a material of guiding layer, including complex fabrication process, a lot of time spent, and high cost. After finishing the fabrication of Love wave biosensors, D. I. water and mouse cells (3T3) are applied to test these SAW devices. The results show that Love wave biosensor using AZ 6112 (thickness 2.130 m) is better than the one using SU-8 (thickness 1.775 m), which implies that Love wave biosensor using AZ 6112 has better performances of frequency shift and phase shift. With concentration of mouse cell increased, the frequency shifts of these two SAW devices are also increased. Moreover, when the same volume (5 l) and concentration (6000 piece/ l) of mouse cells are applied to them, frequency shifts of Love wave biosensor using diluted SU-8 and AZ 6112 as guiding layers are 18.16 kHz and 237.523 kHz respectively, which has demonstrated the sensitivity of frequency shift of the latter is thirteen times than the former.
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