| Summary: | 碩士 === 國立清華大學 === 工程與系統科學系 === 92 === The gyrp is getting more and more important in many fields. A traditional gyro has some drawbacks, for examples, it is bulk in volume and wear of bearings is not avoidable. However, the vibratory micro gyro can senses the changes of angular velocity based on conservation of momentum. Due to its structure, the gyro doesn’t have the wearing problem and has long operation time.
This research used finite element analysis to simulate the vibration mode of three kinds of gyro, including two coupled type micro gyros and one decoupled type micro gyro. After the simulation results, these gyros were fabricated by micro-fabrication process, including anodic bonding, lithography, and deep RIE. These gyros are driven by electrostatic force and detected by sensing the changes of capacity. The driving frequency and sensing frequency of first generation micro gyro are both 61 kHz. The driving frequency of second generation micro gyro is 45.68 kHz, with the sensing frequency is 45.86 kHz. The driving frequency and sensing frequency of third generation micro gyro are both 6.7 kHz
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