Integration of the Electrothermal Actuator and Piezoresistive Sensor by CMOS Process
碩士 === 國立清華大學 === 動力機械工程學系 === 92 === Nowadays, mature CMOS standard process is not restricted itself in IC fabrication but steadily integrates MEMS on a monolithic single chip called CMOS MEMS. IC and MEMS fabricated under CMOS process could eliminate processing steps and their complexity. The meri...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/95736292082497869493 |