The Search and Research of Tungsten Oxide by MPECVD
碩士 === 國立清華大學 === 材料科學工程學系 === 92 === Tungsten oxides have been grown by microwave plasma enhanced chemical vapor deposition (MPECVD) directly on silicon substrate without using any catalyst. Due to the unique property of the plasma system, tungsten oxide could be synthesized in just several minutes...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10498776522529628067 |