Study of thermoelectric properties of Bi/Te composite thin films by sputter deposition
碩士 === 國立清華大學 === 材料科學工程學系 === 92 === With the evolution of VLSI process technology, component density of Integrated circuit(IC) increased significantly and heat dissipation is becoming a very important issue for device performance and IC reliability consideration. Due to the advantages of miniaturi...
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| Format: | Others |
| Language: | zh-TW |
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2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/986uqc |