The Research of the KOH/Alcohol Etchant System in Wet Etching of Monocrystal Silicon
博士 === 國立清華大學 === 化學工程學系 === 92 === Abstract The study is mainly to discuss the influence of alcohol moderator on the different silicon crystalline plane, when the alcohol moderator was added into the KOH solution. Two types of alcohols were added into the KOH solution, one OH group alcohol and mult...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6qun6c |