A Study on The PZT Thin Films Prepared by Sputtering
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 92 === Lead zirconate titanate (PZT) thin films have been extensively investigated for many applications, such as MEMS devices (actuators, sensors, transducers, SAW devices) and memory devices (DRAM, NVFRAM). In this study, the sputtering deposition methods were us...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60836679501226146737 |