Polyimide based Optical Splitters on Silicon Substrate

• Main Authors: Chin-Lun Li, 李斳倫
• Other Authors: Chien-Hsiang Chao
• Format: Others
• Language: zh-TW
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/54800370894057625769

碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 92 === 1x8 optical power splitters on silicon substrate were successfully fabricated based on polyimide channel waveguides structure. The 1x8 power splitter was first designed by bean propagation method. The device was fabricated using polyimide provided by Eternal chemistry. The TE propagation loss of the waveguide is 1.4dB with a index contrast of 0.73%. However, the waveguide is not able to support low-loss propagation of TM polarized light. The chip size of the 1x8 power splitter is 17mm x 3mm. After fabrication, the optical characteristics of the splitter were measured.