| Summary: | 碩士 === 國立中山大學 === 物理學系研究所 === 92 === In this work a plasma torch system has been setup. Using the methane as gas source, carbon atoms were ionized and diamond nanoparticles were synthesized. Argon or nitrogen gas was applied as carrying gas for dilution methane.
By means of Field-emission scanning electron microscopy (FE-SEM), X-ray Diffraction (XRD), Raman Scattering, Transmission Electron Microscopy (TEM) and Transmission Electron Diffraction (TED) diamond nanoparticles were characterized.
The system is characteristic structured with a MP system interior with an antenna. The microwave was guided in chamber and to the antenna tip, and induced the microwave energy gather on the tip then induces plasma under higher pressure.
Expect sample N01 that used nitrogen carrying gas and gas flow rate was 0.6 L/min, the particles all have the size between 25-50nm from the analysis of the morphology of the particles by SEM. The particles size increased along with the carrying gas flow rate as well as the pressure increased. The materials structure has been analyzed by Raman, XRD. The natural diamond structure has been found synthesizing the nanoparticles under the high pressure or the higher catalyst gas flow rate. And as carrying gas effect, nitrogen is better than Argon. The electron beam energy would destroy the structure of diamond nanoparticles during TEM analysis and diamond nanoparticles changed from single crystal to amorphous has been observed by TED analysis.
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