The dynamic analysis of MEMS and chip precision positioning platform

碩士 === 國立彰化師範大學 === 機電工程學系 === 92 ===

Bibliographic Details
Main Author: 陳俊皓
Other Authors: 王宜明
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/87612972041983378902
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spelling ndltd-TW-092NCUE54890122015-10-13T12:57:07Z http://ndltd.ncl.edu.tw/handle/87612972041983378902 The dynamic analysis of MEMS and chip precision positioning platform 微機電與晶片精密定位平台之動態分析 陳俊皓 碩士 國立彰化師範大學 機電工程學系 92 王宜明 2004 學位論文 ; thesis 88 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立彰化師範大學 === 機電工程學系 === 92 ===
author2 王宜明
author_facet 王宜明
陳俊皓
author 陳俊皓
spellingShingle 陳俊皓
The dynamic analysis of MEMS and chip precision positioning platform
author_sort 陳俊皓
title The dynamic analysis of MEMS and chip precision positioning platform
title_short The dynamic analysis of MEMS and chip precision positioning platform
title_full The dynamic analysis of MEMS and chip precision positioning platform
title_fullStr The dynamic analysis of MEMS and chip precision positioning platform
title_full_unstemmed The dynamic analysis of MEMS and chip precision positioning platform
title_sort dynamic analysis of mems and chip precision positioning platform
publishDate 2004
url http://ndltd.ncl.edu.tw/handle/87612972041983378902
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