Study of EWOD-based Actuation for Digital Microfluidic System

• Main Authors: Shih-Chyn Lin, 林師勤
• Other Authors: Tsung-Hsun Yang
• Format: Others
• Language: en_US
• Published: 2004
• Online Access: http://ndltd.ncl.edu.tw/handle/81826403283390538416

碩士 === 國立中央大學 === 光電科學研究所 === 92 === This thesis reports the design and fabrication of an electrowetting on dielectric (EWOD) microfluidic device that has the potential to demonstrate technologies for real-time microfluidic system applications in lab-on-a-chip (LoC) or micro total analysis system (µTAS). In such a way, the merits of miniaturized device are much smaller volume of samples, low cost, disposable, and portable. The microfluidic system is based on the principle of EWOD. First, contact angles of droplets on different surface were discussed. Second, the fabrication of EWOD devices by the conventional and the flip-flop processes were compared with the improved process and their advantages and disadvantages were also discussed. Third, 1-D and 2-D EWOD devices were tested for various fabrication parameters including materials for dielectric layer, gap spacing, and concentration of Teflon® AF. With the dielectric layer deposited by PECVD, the driving voltage of the EWOD-based microfluidic system was around 35 V in air environment. In experiments, the four fundamental operations of microfluidic system were carried out in the EWOD device. In addition, two droplets extracted from the light stick were applied to investigate the mixing process in real time. To the end, a novel configuration for real time monitoring on DNA hybridization reaction rate was proposed on the base of the EWOD microfluidic device.